X-Checker
Wafer X-Checker
Performance Monitor
for your SEM/EDS System
Enlarged view of X-Checker
X-Checker
X-Checker is a calibration aid to help you monitor
the performance of your EDS X-ray system on an SEM. X-Checker contains a series of
standard materials on a 1" diameter aluminum stub.
With X-Checker, you can
check your detector resolution and calibration, test for contamination on the detector
window, monitor low-end sensitivity, and calibrate your image analysis software.
When was the last time you checked the performance of your EDS system?
Wafer X-Checker
Semiconductor fabs with defect review tool SEMs (DRTs) have a critical
need to monitor the performance of their systems. The cost of running a fab where
defects are not analyzed correctly is prohibitive.
The Wafer X-Checker contains all the
standard materials needed to monitor the resolution, calibration, light-element
sensitivity, and low-end noise performance of your DRT, right on a silicon wafer.
It is
available in 200mm and 300mm diameter to fit any DRT. If you don't have a way to monitor the
performance of your DRT, you don't know if it is giving you the right answers. Can you
afford to run your fab like this?
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Standard Materials
X-Checker Standard (Al, Cu, C, Mn, 2 Ni grids)
X-Checker BN (adds boron nitride for low-end sensitivity)
X-Checker Extra (adds fluorine to test low-end resolution,
and beryllium to test sensitivity at the extreme low-end)
Wafer X-Checker (BN, C, F, Al, Mn, Cu, Ni grid, 304 SS )
| Description |
Part
Number |
Price |
| X-Checker Standard |
S100 |
$300
|
|
| X-Checker BN |
S100B |
$350
|
|
| X-Checker Extra |
S150 |
$400 |
|
| Wafer X-Checker 200mm |
W200 |
$800 |
|
| Wafer X-Checker 300mm |
W300 |
$1200 |
|
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